Factors affecting the efficiency of liquid-vapor phase-change actuators during dynamic operation are explored. To do this, a model actuator was specifically designed so that actuator geometry, material properties and operation could be easily varied in order to parametrically study their effects on actuator efficiency. A numerical model was developed so that the detailed energy budget within the device could be elucidated. It was found that device efficiency was maximized when the energy input into the actuator was equal to the energy required to dry out the evaporator. Membrane thermal mass and compliance, as well as the thickness of the evaporating liquid layer were also found to have a large impact on efficiency. In contrast, membrane thermal conductivity was found to have a minimal effect on efficiency for dynamic operation. Based on the parameter study, a liquid-vapor phase-change membrane actuator fabricated with a 10.3μm thick wicking structure and a 200nm thick 3mm-square silicon nitride actuation membrane was shown to demonstrate improved performance characteristics. The actuator generated peak pressures and deflections of 123kPa and 167μm when actuated with a 14.3mJ heating pulse for a thermal efficiency of 0.15%.
1.
Jeong
O.
Yang
S.
Fabrication and Test of a Thermopneumatic Micropump with a Corrugated p+ Diaphragm
,” Sensors and Actuators A
, Vol. 83
, pp. 249
–255
, 2000
.2.
Yang
X.
Grosjean
C.
Tai
Y.
Design, Fabrication, and Testing of Micromachined Silicone Rubber Membrane Valves
,” Journal of Microelectromechanical Systems
, Vol. 8
, no. 4
, 393
–402
, Dec., 1999
.3.
Roch
I.
Bidaud
P.
Collard
D.
Buchaillot
L.
Fabrication and Characterization of an SU-8 Gripper Actuated by a Shape Memory Alloy Thin Film
,” Journal of Micromechanics and Microengineering
, Vol. 13
, pp. 330
–336
, 2003
.4.
Garcia
E.
Sniegowski
J.
Surface Micromachined Microengine
,” Sensors and Actuators A
, Vol. 48
, pp. 203
–214
, 1995
.5.
Ataka
M.
Omodaka
A.
Takeshima
N.
Fujita
H.
Fabrication and Operation of Polymide Bimorph Actuators for a Ciliary Motion System
,” Journal of Microelectromechanical Systems
, Vol. 2
, no. 4
, pp. 146
–150
, Dec, 1993
.6.
Lagorce
L.
Brand
O.
Allen
M.
Magnetic Microactuators Based on Polymer Magnets
,” Journal of Microelectromechanical Systems
, Vol. 8
, no. 1
, pp. 2
–9
, March, 2003
.7.
P. Basset, A. Kaiser, P. Bigotte, D. Collard, L. Buchaillot, “A Large Stepwise Motion Electrostatic Actuator for a Wireless Microrobot,” Proceedings of IEEE Micro Electro Mechanical Systems, Las Vegas, NV, pp. 606–609, Jan., 2002.
8.
Friend
J.
Umeshima
A.
Ishii
T.
Nakamura
K.
Ueha
S.
A Piezoelectric linear Actuator Formed From a Multitude of Bimorphs
,” Sensors and Actuators A
, Vol. 109
, pp. 242
–251
, 2004
.9.
Schabmueller
C. J. G.
Niblock
T.
Time Constant and Lateral Resonances of Thermal Vertical Bimorph Actuators
,” Journal of Micromechanics and Microengineering
, Vol. 12
, pp. 410
–413
, 2002
.10.
Wego
A.
Glock
H.
Pagel
L.
Richter
S.
Investigations on Thermo-Pneumatic Volume Actuators Based on PCB Technology
,” Sensors and Actuators A
, Vol. 93
, pp. 95
–102
, 2001
.11.
Abadie
J.
Chaillet
N.
Lexcellent
C.
An Integrated Shape Memory Alloy Micro-Actuator Controlled by Thermoelectric Effect
,” Sensors and Actuators A
, Vol. 99
, pp. 297
–303
, 2002
.12.
Carlen
E.
Mastrangelo
C.
Electrothermally Activated Paraffin Microactuators
,” Journal of Microelectromechanical Systems
, Vol. 11
, no. 3
, pp. 165
–174
, June, 2002
.13.
Lin
L.
Pisano
A.
Thermal Bubble Powered Microactuators
,” Microsystem Technologies
, Vol. 1
, pp. 51
–58
, 1994
.14.
Shoji
S.
Fluids for Sensor Systems
,” Topics in Current Chemistry
, Vol. 194
, Springer-Verlag, Berlin, Germany, pp. 163
–188
, 1998
.15.
A. Henning, J. Fitch, D. Hopkins, L. Lilly, R. Faeth, E. Falsken, M. Zdeblick, “A Thermopneumatically Actuated Microvalve for Liquid Expansion and Proportional Control,” Proceedings of Transducers ’97 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, pp. 825–828, June, 1997.
16.
Sim
W.
Yoon
H.
Jeong
O.
Yang
S.
A Phase-Change Type Micropump with Aluminum Flap Valves
,” Journal of Micromechanics and Microengineering
Vol. 13
, pp. 286
–294
, 2003
.17.
A. Yamamoto, T. Nino, T. Higuchi, “High Precision Electrostatic Actuator With Novel Electrode Design,” Proceedings of IEEE Micro Electro Mechanical Systems, Hiedelberg, Ger., pp. 408–413, Jan., 1998.
18.
M. Tabir-Azar, “Direct Optical Control for a Silicon Microactuator,” Technical Digest of the International Conference on Solid-State Sensors and Actuators, Montreaux, Switzerland, pp. 229–235, June, 1989.
19.
Bergstrom
P.
Ji
J.
Liu
Y.
Kaviany
M.
Wise
K.
Thermally Driven Phase-Change Microactuation
,” Journal of Microelectromechanical Systems
, Vol. 4
, no. 2
, pp. 10
–17
, March, 1995.20.
Rich
C.
Wise
K.
A High-Flow Thermopneumatic Microvalve With Improved Efficiency and Integrated State Sensing
,” Journal of Microelectromechanical Systems
, Vol. 12
, no. 2
, pp. 201
–208
, April, 2003.21.
S. Whalen, Cycle Work from a MEMS Heat Engine and Characterization of the Liquid-Vapor Phase Change Actuation Mechanism, Ph.D. Dissertation, Washington State University, 2004.
22.
V. Carey, Liquid-Vapor Phase-Change Phenomena, Hemisphere, 1992.
23.
Vlassak
J.
Nix
W.
A New Bulge Test Technique for the Determination of Young’s Modulus Ratio of Thin Film
,” Journal of Materials Research
, Vol. 7
, no. 12
, pp. 3242
–3249
, 1992
.24.
Stephan
P.
Busse
C.
Analysis of Heat Transfer Coefficient of Grooved Heat Pipe Evporated Walls
,” International Journal of Heat and Mass Transfer
, Vol. 34
, no. 2
, pp. 383
–391
, 1992
.25.
Potash
M.
Wayner
P.
Evaporation from a Two-Dimensional Extended Meniscus
,” International Journal of Heat and Mass Transfer
, Vol. 15
, pp. 1851
–1863
, 1972
.26.
Hall
J.
Apperson
N.
Crozier
B.
Richards
R.
Bahr
D.
Richards
C.
A Facility for Characterizing the Dynamic Mechanical Behavior of Thin Membranes for Microelectromechanical Systems
,” Review of Scientific Instruments
, Vol. 73
, no. 5
, pp. 2067
–2072
, May, 2002
27.
M. Zdeblick, R. Anderson, J. Jankowski, B. Kline-Schoder, L. Cristel, R. Miles, W. Weber, “Thermopneumatically Actuated Microvalves and Integrated Electro-Fluidic Circuits,” Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 251–255, June, 1994.
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