This paper details theoretical analyses and experimental characterization of high-frequency multi-stage micro pumps. The MEMS-fabricated micro pumps have been developed for use in a highly-integrated chemical monitoring system under development at the University of Michigan’s Wireless Integrated Micro-Systems center. Tests are reported on a 20x meso-scale 2-stage pump developed to validate the theoretical analyses. Detailed comparisons of the pump performance and unsteady pressure traces show that the theoretical analyses capture the main features of the flow in the pump. A MEMS-fabricated device has been developed and tested. The use of theoretical analyses for the design of the pump is described. This device produces A maximum flow of 1.1 ccm and a maximum pressure of 879 Pa.

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