We present a novel experimental method for measuring the mechanical properties of nano-thickness materials using a freestanding membrane test. Specially fabricated axisymmetric freestanding membranes are centrally deflected using a spherical indenter attached to a custom-designed MEMS load cell. Experiments on freestanding films allows us to determine directly the mechanical properties of the films, over a broad range of length scales, without the confounding effects of a substrate.
Volume Subject Area:
Microelectromechanical Systems
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