We present a novel experimental method for measuring the mechanical properties of nano-thickness materials using a freestanding membrane test. Specially fabricated axisymmetric freestanding membranes are centrally deflected using a spherical indenter attached to a custom-designed MEMS load cell. Experiments on freestanding films allows us to determine directly the mechanical properties of the films, over a broad range of length scales, without the confounding effects of a substrate.
Mechanical Testing of Freestanding Nano-Films Using a Novel Finite Diameter Tip MEMS-Based Testing Machine
- Views Icon Views
- Share Icon Share
- Search Site
Leseman, ZC, Sheikh, Z, Mackin, TJ, & Begley, M. "Mechanical Testing of Freestanding Nano-Films Using a Novel Finite Diameter Tip MEMS-Based Testing Machine." Proceedings of the ASME 2005 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Orlando, Florida, USA. November 5–11, 2005. pp. 473-477. ASME. https://doi.org/10.1115/IMECE2005-80987
Download citation file: