This work designs and fabricates a microchannel structure for measurement of wall temperature fields in two-phase flow. The microchannel with hydraulic diameter of 100 micrometers is etched into a suspended beam of silicon with three independently heated regions and integrated doped silicon resistors sensitive to channel temperature. Doped silicon resistors are also sensitive to strain in the silicon caused by pressure transients in the channel, so sensors are designed with two different orientations and thus two different piezoresistive coefficients to allow decoupling of pressure and temperature effects. Use of a 400 micrometer wide suspended beam reduces side-wall conduction compared to a bulk sample and provides better opportunities to measure the influence of flow regimes on heat transfer coefficients in future work. Use of the central heater reduces fluid preheating in the inlet plenum. The measured temperature distributions at flowrates up to 0.25 ml/min with heat fluxes into the silicon beam up to 78 W/cm2 show initial capabilities of the structure.
Skip Nav Destination
ASME 2004 International Mechanical Engineering Congress and Exposition
November 13–19, 2004
Anaheim, California, USA
Conference Sponsors:
- Heat Transfer Division
ISBN:
0-7918-4711-X
PROCEEDINGS PAPER
Microchannel Experimental Structure for Measuring Temperature Fields During Convective Boiling
Kenneth E. Goodson,
Kenneth E. Goodson
Stanford University
Search for other works by this author on:
Sridhar Narasimhan
Sridhar Narasimhan
Intel Corporation
Search for other works by this author on:
Theresa A. Kramer
Stanford University
Roger D. Flynn
Stanford University
David W. Fogg
Stanford University
Evelyn N. Wang
Stanford University
Carlos H. Hidrovo
Stanford University
Kenneth E. Goodson
Stanford University
Ravi S. Prasher
Intel Corporation
David S. Chau
Intel Corporation
Sridhar Narasimhan
Intel Corporation
Paper No:
IMECE2004-61936, pp. 699-705; 7 pages
Published Online:
March 24, 2008
Citation
Kramer, TA, Flynn, RD, Fogg, DW, Wang, EN, Hidrovo, CH, Goodson, KE, Prasher, RS, Chau, DS, & Narasimhan, S. "Microchannel Experimental Structure for Measuring Temperature Fields During Convective Boiling." Proceedings of the ASME 2004 International Mechanical Engineering Congress and Exposition. Heat Transfer, Volume 2. Anaheim, California, USA. November 13–19, 2004. pp. 699-705. ASME. https://doi.org/10.1115/IMECE2004-61936
Download citation file:
6
Views
0
Citations
Related Proceedings Papers
Flow Boiling in a Microchannel Heat Sink
IMECE2005
Related Articles
Impact of Channel Geometry on Two-Phase Flow Heat Transfer Characteristics of Refrigerants in Microchannel Heat Exchangers
J. Heat Transfer (May,1998)
Flow Boiling Heat Transfer in Microchannels
J. Heat Transfer (October,2007)
A Flow Boiling Heat Transfer Investigation of FC-72 in a Microtube Using Liquid Crystal Thermography
J. Heat Transfer (August,2007)
Related Chapters
Experiment Investigation of Flow Boiling Process Including Cavitation in Micro-Channel
Inaugural US-EU-China Thermophysics Conference-Renewable Energy 2009 (UECTC 2009 Proceedings)
Thermocavitation in a Microchannel with a Low Power Light Source
Proceedings of the 10th International Symposium on Cavitation (CAV2018)
EVALUATION OF THERMAL PROBE COOLING EFFECT BASED ON PIPELINE PARALLEL OPTICAL CABLE
Pipeline Integrity Management Under Geohazard Conditions (PIMG)