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Proceedings Papers

Microfabrication and Characterization of Electro-Thermal-Compliant Micro Devices

Jun Li, G. K. Ananthasuresh
Proc. ASME. IDETC-CIE2000, Volume 7A: 26th Biennial Mechanisms and Robotics Conference, 621-633, September 10–13, 2000
Publisher: American Society of Mechanical Engineers
Paper No: DETC2000/MECH-14118
https://doi.org/10.1115/DETC2000/MECH-14118
View Paper titled, Microfabrication and Characterization of Electro-Thermal-Compliant Micro Devices
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Topics: Actuators, Compliant mechanisms, Excimer lasers, Heating, Joules, Materials properties, Metals, Microelectromechanical systems, Microfabrication, Micromachining
Proceedings Papers

Tension-Induced Raman Spectrum Enhanced Phenomena of Graphene Membrane

Kai-Ming Hu, Bo Peng, Han Yan, Wen-Ming Zhang, Zhong-Yin Xue, Zeng-Feng Di, Ya-Ting Sun
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A016, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-85158
https://doi.org/10.1115/DETC2018-85158
View Paper titled, Tension-Induced Raman Spectrum Enhanced Phenomena of Graphene Membrane
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Topics: Graphene, Membranes, Raman spectra, Tension, Silicon-on-insulator, Microfabrication, Microscale devices, Semiconductor wafers, Stress
Proceedings Papers

Characterization of a Non-Interdigitated Comb Drive

Mary Gopanchuk, Mohamed Arabi, N. Nelson-Fitzpatrick, Majed S. Al-Ghamdi, Eihab Abdel-Rahman, Mustafa Yavuz
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A013, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-86271
https://doi.org/10.1115/DETC2018-86271
View Paper titled, Characterization of a Non-Interdigitated Comb Drive
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Topics: Actuators, Design, Manufacturing, Semiconductor wafers, Sensors, Silicon-on-insulator
Proceedings Papers

Modeling and Testing of a Minimally Powered SOI-DRIE MEMS Pressure Sensor for Discrete Blast Detection

Vicky Taffoti Fondjo, Franklin Fondjo Fotou, Oliver M. Barham, Muhammad Khan, Scott G. Rauscher, Daniel L. Jean
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A027, August 26–29, 2018
Publisher: American Society of Mechanical Engineers
Paper No: DETC2018-85898
https://doi.org/10.1115/DETC2018-85898
View Paper titled, Modeling and Testing of a Minimally Powered SOI-DRIE MEMS Pressure Sensor for Discrete Blast Detection
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Topics: Microelectromechanical systems, Modeling, Pressure sensors, Silicon-on-insulator, Testing, Diaphragms (Mechanical devices), Diaphragms (Structural), Pressure, Cantilever beams, Sensors
Proceedings Papers

Electrostatically Tunable Nanomechanical Shallow Arches

Syed N. R. Kazmi, Amal Z. Hajjaj, Pedro M. F. J. Costa, Mohammad I. Younis
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A011, August 6–9, 2017
Publisher: American Society of Mechanical Engineers
Paper No: DETC2017-67845
https://doi.org/10.1115/DETC2017-67845
View Paper titled, Electrostatically Tunable Nanomechanical Shallow Arches
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Topics: Arches, Silicon-on-insulator, Cathode rays, Electrodes, Electron beams, Filtration, Lithography, Semiconductor wafers, Silicon, Temperature
Proceedings Papers

Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields

Slava Krylov, Stella Lulinsky, Bojan R. Ilic, Inbar Schneider
Proc. ASME. IDETC-CIE2014, Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems, V004T09A009, August 17–20, 2014
Publisher: American Society of Mechanical Engineers
Paper No: DETC2014-34904
https://doi.org/10.1115/DETC2014-34904
View Paper titled, Collective Dynamics of Arrays of Micro Cantilevers Interacting Through Fringing Electrostatic Fields
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Topics: Dynamics (Mechanics), Electric fields, Microcantilevers, Silicon-on-insulator, Computer simulation, Degrees of freedom, Excitation, Finite element analysis, Manufacturing, Semiconductor wafers
Proceedings Papers

Bistable Threshold Sensor With Mechanically Nonlinear Self-Limiting Suspension and Electrostatic Actuation

Shila Rabanim, Emil Amir, Slava Krylov
Proc. ASME. IDETC-CIE2011, Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 135-144, August 28–31, 2011
Publisher: American Society of Mechanical Engineers
Paper No: DETC2011-47575
https://doi.org/10.1115/DETC2011-47575
View Paper titled, Bistable Threshold Sensor With Mechanically Nonlinear Self-Limiting Suspension and Electrostatic Actuation
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Topics: Sensors, Silicon-on-insulator, Displacement, Manufacturing, Modeling, Reactive-ion etching, Reliability, Resolution (Optics), Stiffness, Transducers
Proceedings Papers

Kinematically Excited Large Angle Tilting Actuator

Assaf Ya’akobovitz, Slava Krylov
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 555-560, August 15–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: DETC2010-28454
https://doi.org/10.1115/DETC2010-28454
View Paper titled, Kinematically Excited Large Angle Tilting Actuator
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Topics: Actuators, Manufacturing, Microactuators, Reactive-ion etching, Semiconductor wafers, Silicon-on-insulator, Transducers
Proceedings Papers

Parametric Excitation of Flexural Vibrations of Micro Beams by Fringing Electrostatic Fields

Slava Krylov, Nicola Molinazzi, Tsvi Shmilovich, Uri Pomerantz, Stella Lulinsky
Proc. ASME. IDETC-CIE2010, Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems, 601-611, August 15–18, 2010
Publisher: American Society of Mechanical Engineers
Paper No: DETC2010-28684
https://doi.org/10.1115/DETC2010-28684
View Paper titled, Parametric Excitation of Flexural Vibrations of Micro Beams by Fringing Electrostatic Fields
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Topics: Electric fields, Excitation, Microbeams, Vibration, Electrodes, Silicon-on-insulator, Stiffness, Actuators, Deflection, Fittings
Proceedings Papers

Hysteresis Suppression in Nonlinear Mathieu M/NEMS Resonators

N. Kacem, S. Hentz, S. Baguet, R. Dufour
Proc. ASME. IDETC-CIE2009, Volume 4: 7th International Conference on Multibody Systems, Nonlinear Dynamics, and Control, Parts A, B and C, 787-792, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-86717
https://doi.org/10.1115/DETC2009-86717
View Paper titled, Hysteresis Suppression in Nonlinear Mathieu M/NEMS Resonators
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Topics: Design, Electrical measurement, Nanoelectromechanical systems, Nanomechanical resonators, Resonance, Semiconductor wafers, Sensors, Silicon-on-insulator
Proceedings Papers

Facets and Fissures of a Fractured SOI Wafer

Quentin Aten
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 753, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87584
https://doi.org/10.1115/DETC2009-87584
View Paper titled, Facets and Fissures of a Fractured SOI Wafer
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Topics: Semiconductor wafers, Silicon-on-insulator, Silicon, Electron microscopy, Etching
Proceedings Papers

Temple of Zeus: A Micro Replica

Aditya N. Das, Rakesh Murthy
Proc. ASME. IDETC-CIE2009, Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies, 747, August 30–September 2, 2009
Publisher: American Society of Mechanical Engineers
Paper No: DETC2009-87523
https://doi.org/10.1115/DETC2009-87523
View Paper titled, Temple of Zeus: A Micro Replica
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Topics: Epoxy adhesives, Etching, Lenses (Optics), Light sources, Microassembling, Microelectromechanical systems, Needles, Photolithography, Robots, Sapphire