Distributed-parameters vibration model of microcantilevers in tapping-mode Atomic Force Microscopy (AFM) is developed and is shown to be highly nonlinear. The question of why these nonlinearities are important and how they influence the predicted frequency response behavior of the cantilevers is addressed by comparing the results of developed model with a simple lumped-parameters model that has been extensively studied in the literature so far. The interaction forces between the microcantilever tip and the sample is supposed to be the same in both models and consist of attractive and repulsive interaction force regimes. In addition, experimental measurements are provided for a typical microcantilever-sample system to demonstrate the superiority of distributed-parameters formulation over the lumped-parameters model to predict the frequency response behavior of the AFM prob. The results indicate that the nonlinear continuous model is more accurate particularly in the estimation of the saturated amplitude and frequency zone in which the tip-sample contact occurs.
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ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 15–18, 2010
Montreal, Quebec, Canada
Conference Sponsors:
- Design Engineering Division and Computers in Engineering Division
ISBN:
978-0-7918-4412-0
PROCEEDINGS PAPER
Frequency Response Behavior of Microcantilevers in Tapping-Mode Atomic Force Microscopy
Aidin Delnavaz,
Aidin Delnavaz
Sharif University of Technology, Tehran, Iran
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S. Nima Mahmoodi,
S. Nima Mahmoodi
Virginia Tech, Blacksburg, VA
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Nader Jalili,
Nader Jalili
Northeastern University, Boston, MA
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Hassan Zohoor
Hassan Zohoor
Sharif University of Technology, Tehran, Iran
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Aidin Delnavaz
Sharif University of Technology, Tehran, Iran
S. Nima Mahmoodi
Virginia Tech, Blacksburg, VA
Nader Jalili
Northeastern University, Boston, MA
Hassan Zohoor
Sharif University of Technology, Tehran, Iran
Paper No:
DETC2010-28196, pp. 469-476; 8 pages
Published Online:
March 8, 2011
Citation
Delnavaz, A, Mahmoodi, SN, Jalili, N, & Zohoor, H. "Frequency Response Behavior of Microcantilevers in Tapping-Mode Atomic Force Microscopy." Proceedings of the ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems. Montreal, Quebec, Canada. August 15–18, 2010. pp. 469-476. ASME. https://doi.org/10.1115/DETC2010-28196
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