Future optical micro systems such as Micro Electro Mechanical Systems (MEMS) scanners and micro-mirrors will extend the resolution and sensitivity offered by their predecessors. These systems face the challenge of achieving nanometer precision subjected to various disturbances. Predicting the performance of such systems early in the design process can significantly impact the design cost and also improve the quality of the design. Our approach aims to predict the performance of such systems under various disturbance sources and develop a generalized design approach for MEMS structures. In this study, we used ANSYS for modeling and analysis of a torsional MEMS scanner mirror. ANSYS modal analysis results, which are eigenvalues (natural frequencies) and eigenvectors (modeshapes), are used to obtain the state space representation of the mirror. The state space model of the scanner mirror was reduced using various reduction techniques to eliminate the states that are insignificant for the transfer functions of interest. The results of these techniques were compared to obtain the best approach to obtain a lower order model that still contains all of the relevant dynamics of the original model. After the model size is reduced significantly, a disturbance analysis is performed using Lyapunov approach to obtain root-mean-square (RMS) values of the mirror rotation angle under the effect of a disturbance torque. The Lyapunov approach results were validated using a time domain analysis.
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ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
September 24–28, 2005
Long Beach, California, USA
Conference Sponsors:
- Design Engineering Division and Computers and Information in Engineering Division
ISBN:
0-7918-4738-1
PROCEEDINGS PAPER
Dynamic Analysis of a Torsional MEMS Scanner Mirror: Part 1 — Disturbance Analysis Framework
Faik Can Meral,
Faik Can Meral
Koc University, Sariyer, Istanbul
Search for other works by this author on:
Ipek Basdogan
Ipek Basdogan
Koc University, Sariyer, Istanbul
Search for other works by this author on:
Faik Can Meral
Koc University, Sariyer, Istanbul
Ipek Basdogan
Koc University, Sariyer, Istanbul
Paper No:
DETC2005-85225, pp. 489-494; 6 pages
Published Online:
June 11, 2008
Citation
Meral, FC, & Basdogan, I. "Dynamic Analysis of a Torsional MEMS Scanner Mirror: Part 1 — Disturbance Analysis Framework." Proceedings of the ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 1: 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C. Long Beach, California, USA. September 24–28, 2005. pp. 489-494. ASME. https://doi.org/10.1115/DETC2005-85225
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