In order to create shape memory alloy (SMA) bimorph microactuators with high-precision features, a novel fabrication process combined with electron beam (E-beam) evaporation, lift-off resist and isotropic XeF2 dry etching method was developed. To examine the effect of E-beam deposition and annealing process on nitinol (NiTi) characteristics, the NiTi thin film samples with different deposition rate and overflow conditions during annealing process were investigated. With the characterizations using scanning electron microscope and x-ray diffraction, the results indicated that low E-beam deposition rate and argon employed annealing process could benefit the formation of NiTi crystalline structure. Besides, SMA bimorph microactuators with high-precision features as small as 5 microns were successfully fabricated. Furthermore, the thermomechanical performance was experimentally verified and compared with finite element analysis simulation results.
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ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 26–29, 2018
Quebec City, Quebec, Canada
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-5179-1
PROCEEDINGS PAPER
New Insights Into Shape Memory Alloy Bimorph Actuators Formed by Electron Beam Evaporation
Hao Sun,
Hao Sun
Northwestern Polytechnical University, Xi'an, China
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Jianjun Luo,
Jianjun Luo
Northwestern Polytechnical University, Xi'an, China
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Ming Lu,
Ming Lu
Brookhaven National Laboratory, Upton, NY
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Dmytro Nykypanchuk,
Dmytro Nykypanchuk
Brookhaven National Laboratory, Upton, NY
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Yong Shi
Yong Shi
Stevens Institute of Technology, Hoboken, NJ
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Hao Sun
Northwestern Polytechnical University, Xi'an, China
Jianjun Luo
Northwestern Polytechnical University, Xi'an, China
Ming Lu
Brookhaven National Laboratory, Upton, NY
Dmytro Nykypanchuk
Brookhaven National Laboratory, Upton, NY
Yong Shi
Stevens Institute of Technology, Hoboken, NJ
Paper No:
DETC2018-85812, V004T08A019; 8 pages
Published Online:
November 2, 2018
Citation
Sun, H, Luo, J, Lu, M, Nykypanchuk, D, & Shi, Y. "New Insights Into Shape Memory Alloy Bimorph Actuators Formed by Electron Beam Evaporation." Proceedings of the ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. Quebec City, Quebec, Canada. August 26–29, 2018. V004T08A019. ASME. https://doi.org/10.1115/DETC2018-85812
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