Bistable microsystems have drawn considerable interest from the MEMS/NEMS research community not only due to their broad applicability in commercial applications, such as switching, but also because of the rich dynamic behavior they commonly exhibit. While a number of prior investigations have studied the dynamics of bistable microsystems, comparatively few works have sought to characterize their transient behavior. The present effort seeks to address this through the modeling and analysis of an optically-actuated, bistable MEMS switch. The work begins with the development of a distributed-parameter representation for the system, which is subsequently reduced to a lumped-mass analog and analyzed through the use of numerical simulation. The influence of various system and excitation parameters, including the applied axial load and optical actuation profile, on the system’s transient response is then investigated. Ultimately, the methodologies and results presented herein should provide for a refined predictive design capability for optically-actuated, bistable MEMS devices.
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ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 15–18, 2010
Montreal, Quebec, Canada
Conference Sponsors:
- Design Engineering Division and Computers in Engineering Division
ISBN:
978-0-7918-4412-0
PROCEEDINGS PAPER
Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device
Vijay Kumar,
Vijay Kumar
Purdue University, West Lafayette, IN
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Jeffrey F. Rhoads
Jeffrey F. Rhoads
Purdue University, West Lafayette, IN
Search for other works by this author on:
Vijay Kumar
Purdue University, West Lafayette, IN
Jeffrey F. Rhoads
Purdue University, West Lafayette, IN
Paper No:
DETC2010-29040, pp. 653-660; 8 pages
Published Online:
March 8, 2011
Citation
Kumar, V, & Rhoads, JF. "Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device." Proceedings of the ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems. Montreal, Quebec, Canada. August 15–18, 2010. pp. 653-660. ASME. https://doi.org/10.1115/DETC2010-29040
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