Tele-Operated Microsystems Laboratory

This paper presents the architecture for a remotely controllable and interactive MEMS laboratory. There have been significant advances in computer simulations of MEMS devices, but laboratory testing of devices still plays a crucial role in developing a detailed understanding of MEMS performance. New computer and networking technologies, have allowed the construction of remotely controllable labs for fields spanning education and technology. The main idea of this work is to allow a user in any part of the globe to carry out real-time experiments on a MEMS device using a computer with internet connectivity. The user also has the option of using a commercially available haptic device to feel the magnified nano/micro-scale forces associated with the devices while actuating them. The present interface was tested on a two degree-of-freedom (XY) electrostatic MEMS positioning microstage and a MEMS microgripper.