The paper highlights the complex issues involved in impact dynamics at nano-scale, prevalent in MEMS. The role of protective layers on the silicon substrate is investigated. It is found that the expected viscoelastic behavior of these layers is not activated due to the very short (almost instantaneous) impact times.

Volume Subject Area:
3rd International Conference on Micro- and Nanosystems
Keywords:
nano-conjunction, impact dynamics, ultra-thin bonded layers
Topics:
Dynamics (Mechanics), Nanoscale phenomena
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