The paper highlights the complex issues involved in impact dynamics at nano-scale, prevalent in MEMS. The role of protective layers on the silicon substrate is investigated. It is found that the expected viscoelastic behavior of these layers is not activated due to the very short (almost instantaneous) impact times.
- Design Engineering Division and Computers in Engineering Division
Nano-Scale Impact Dynamics of Ultra-Thin Bonded Layers
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Teodorescu, M, Theodossiades, S, & Rahnejat, H. "Nano-Scale Impact Dynamics of Ultra-Thin Bonded Layers." Proceedings of the ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies. San Diego, California, USA. August 30–September 2, 2009. pp. 367-373. ASME. https://doi.org/10.1115/DETC2009-87667
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