The dynamic response of a mass-spring model of electrostatically actuated MEMS is analyzed when a voltage step is applied. The dynamics of a clamped-clamped beam representing a micro-bridge system are also considered. To model and simulate the strong coupling between the electric and mechanical fields, a general finite element program has been developed based on a new monolithic formulation. The methodology proposed in this program does not require any iterative numerical scheme based on separate electrostatic and mechanical solvers, respectively.

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