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Keywords: femtosecond laserClose
Proc. ASME. DMD2020, 2020 Design of Medical Devices Conference, V001T04A002, April 6–9, 2020
Paper No: DMD2020-9057
... with conventional photolithography processes. Keywords: thin-film microelectrode array, femtosecond laser, microfabrication, polyimide 1. INTRODUCTION Implantable thin-film microelectrode arrays offer a variety of possibilities, including the ability to treat neurological disease and restore vision to blind [1...